Mar 22, 2019  
Spring 2019 Catalog 
    
Spring 2019 Catalog

EL 258 - Semiconductor Fabrication


Credit Hours: 3

This course will provide an overview of semiconductor device fabrication, including both front-end of line and back-end of line processes.  Topics will include basic fabrication and yield; silicon wafer crystal structure and manufacturing; thermal processes; lithography methods; wet and dry etching; chemical and physical vapor deposition; device characterization methods; and applications to simple devices and integrated circuits.

Course Outcomes
Upon completion of this course, the student will be able to:

  • demonstrate mastery of semiconductor instrument terminology and  functionality;
  • identify basic instruments and determine their function in various process applications;
  • apply basic principles of semiconductor instrumentation to design and installation of a functioning fabrication line;
  • apply theoretical concepts of semiconductor physics to the design of real components; and
  • identify and use appropriate technical literature for the research assignment.


Prerequisites: EL 154, MT 126
S (N)