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Sep 07, 2024
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Spring 2020 Catalog [ARCHIVED CATALOG]
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EL 258 - Semiconductor Fabrication Credit Hours: 3
This course will provide an overview of semiconductor device fabrication, including both front-end of line and back-end of line processes. Topics will include basic fabrication and yield; silicon wafer crystal structure and manufacturing; thermal processes; lithography methods; wet and dry etching; chemical and physical vapor deposition; device characterization methods; and applications to simple devices and integrated circuits.
Course Outcomes Upon completion of this course, the student will be able to:
- demonstrate mastery of semiconductor instrument terminology and functionality;
- identify basic instruments and determine their function in various process applications;
- apply basic principles of semiconductor instrumentation to design and installation of a functioning fabrication line;
- apply theoretical concepts of semiconductor physics to the design of real components; and
- identify and use appropriate technical literature for the research assignment.
Prerequisites: EL 154, MT 126 S (N)
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