EL 259 - Lab for EL 258

Credit Hours: 1

This course will provide an overview of the instrumentation used in the fabrication of semiconductor devices, and a simple device will be fabricated and tested. Experiments will include vacuum systems; thermal processes such as dry oxide growth and diffusion in a tube furnace; photolithography; reactive ion etching; metallization via sputtering; profilometry; ellipsometry; fabrication of a PN Junction or Schottky barrier diode; and testing of the device using various characterization instruments.

Course Outcomes
Upon completion of this course, the student will be able to:

construct and test basic vacuum systems using standard components and gauges;
use a top down approach (lithography, deposition, material modification, and etching) to construct a simple semiconductor device;
identify and use appropriate characterization equipment to test a device; and
write a well-organized and comprehensive report of the experimental results.

Corequisites: EL 258
S (N)