EL 282 - Plasma and Thin Films Deposition

Course Outcomes
Upon completion of this course, the student will be able to:

describe DC, AC and RF plasma;
describe transmission of RF electro-magnetic waves in coaxial cables;
construct, analyze and measure RF propagation circuits including RF sources, coaxial cables, impedance-matched circuits, SWR analyzers, and oscilloscopes; and
deposit and measure thin films in DC and AC/RF sputtering systems.