NS 221 - Basic Vacuum Systems II

Credit Hours: 1

Vacuum technology is the field whereby very low-pressure environments are created, maintained and analyzed, such as those needed in the fields of semiconductor manufacturing, glass coating and research. NS221 covers the pump-down performance of rough vacuum systems based on the process of positive displacement. System conductance and pump-down performance are affected by the selection of the specific vacuum hardware component types, such as pumps, pressure gauges, valves, and chambers.

Course Outcomes
At the completion of the course, the student will be able to:

identify flow regime in a given vacuum system;
determine theoretical pumping speed, conductance, and pump-down time for a vacuum system;
choose appropriate vacuum pumps, pressure gauges, valves, chambers, and tubing for vacuum system requirements; and
interpret pump-down data graphically.

Prerequisites: NS 220
F (N)