EL 258 - Semiconductor Fabrication

Credit Hours: 3

This course will provide an overview of semiconductor device fabrication, including both front-end of line and back-end of line processes. Topics will include basic fabrication and yield; silicon wafer crystal structure and manufacturing; thermal processes; lithography methods; wet and dry etching; chemical and physical vapor deposition; device characterization methods; and applications to simple devices and integrated circuits.

Course Outcomes
Upon completion of this course, the student will be able to:

demonstrate mastery of semiconductor instrument terminology and functionality;
identify basic instruments and determine their function in various process applications;
apply basic principles of semiconductor instrumentation to design and installation of a functioning fabrication line;
apply theoretical concepts of semiconductor physics to the design of real components; and
identify and use appropriate technical literature for the research assignment.

Prerequisites: EL 154, MT 126
S (N)