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Nov 12, 2024
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2021-2022 Catalog [ARCHIVED CATALOG]
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EL 259 - Lab for EL 258 Credit Hours: 1
This course will provide an overview of the instrumentation used in the fabrication of semiconductor devices, and a simple device will be fabricated and tested. Experiments will include vacuum systems; thermal processes such as dry oxide growth and diffusion in a tube furnace; photolithography; reactive ion etching; metallization via sputtering; profilometry; ellipsometry; fabrication of a PN Junction or Schottky barrier diode; and testing of the device using various characterization instruments.
Course Outcomes Upon completion of this course, the student will be able to:
- construct and test basic vacuum systems using standard components and gauges;
- use a top down approach (lithography, deposition, material modification, and etching) to construct a simple semiconductor device;
- identify and use appropriate characterization equipment to test a device; and
- write a well-organized and comprehensive report of the experimental results.
Corequisites: EL 258 S (N)
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